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DC Magnetron Püskürtme Yöntemi ile Ag İnce Filmlerin Geliştirilmesi: Çok İnce Pt Ara-katmanın Rolü

Year 2019, , 32 - 37, 05.04.2019
https://doi.org/10.17780/ksujes.489183

Abstract

Bu çalışmada, ince (~ 10 nm) Ag filmleri cam alttaşlar üzerine farklı
sürelerde DC magnetron püskürtme yöntemi ile kaplandı. Ayrıca Ag’nin cam
yüzeyine tutunması ve iletkenliğinin iyileştirilmesine destek olması hedefi ile
çok ince (~ 2 nm) Pt ara-katmanı cam yüzeyine püskürtülerek Ag/Pt/cam
numuneleri üretildi. Analiz sonuçlarından, hazırlanan her bir filmin kübik
yapıda, < 1 nm yüzey pürüzlülük değerine ve 5 ohm/kare’den daha düşük yüzey
direncine sahip olduğu belirlendi. Ag(9nm)/Pt(2nm)/cam numunesinin 3.02
ohm/kare’lik yüzey direnci ve 0.596 nm’lik RMS yüzey pürüzlülüğü değeri ile
diğer hazırlanan numunelere göre daha iyi elektriksel ve morfolojik özelliklere
sahip olduğu görüldü. Pt ara-katman oluşturulmasının Ag filminin iletkenliğini
artırması yanında kızılötesi yansıtıcılığını da artırdığı gözlendi.

References

  • Akin Sonmez, N., Donmez, M., Comert, B., Ozcelik, S. (2018). Ag/M-seed/AZO/glass structures for low-E glass: Effects of metal seeds, International Journal of Applied Glass Science, 9(3), 383-391.
  • Cattin, L., Bernède, J.C., Morsli, M. (2013). Toward indium-free optoelectronic devices: Dielectric/metal/dielectric alternative transparent conductive electrode in organic photovoltaic cells, Pysica Stat. Sol. A, 210(6), 1047-1061.
  • Ding, G., Clavero, C., Schweigert, D., Le, M. (2015). Thickness and microstructure effects in the optical and electrical properties of silver thin films, AIP Advances, 5(11), 117234.
  • Fukuda, K., Lim, S.H., Anders, A. (2008). Coalescence of magnetron-sputtered silver islands affected by transition metal seeding (Ni, Cr, Nb, Zr, Mo, W, Ta) and other parameters, Thin Solid Films, 516, 4546-4552.
  • Greenbank, W., Hirsch, L., Chambon, S. (2018). Electrode de-wetting as a failure mechanism in thermally-aged OPV devices, Solar Energy Materials and Solar Cells, 178, 8-14.
  • Hagen, E., Uber Rubens, H. (1903).“Beziehungen des Reflexions-und Emissionsvermogens der Metalle zu ihrem elektrischen Leitvermogen, Ann Phys. 316, 873-901.
  • Hojabri, A., Kavyani, Z., Ghoranneviss, M. (2017). Effect of substrate temperatures on structural and morphological properties of nano-crystalline silver thin films grown on silicon substrates, Journal of Inorganic and Organometallic Polymers and Materials, 27(1), 53-60.
  • Huang, J., Liu, X., Lu, Y., Zhou, Y., Xu, J., Li, J., Tan, R. (2018). Seed-layer-free growth of ultra-thin Ag transparent conductive films imparts flexibility to polymer solar cells, Solar Energy Materials and Solar Cells, 184, 73-81.
  • Jung, Y.S. (2004). Study on texture evolution and properties of silver thin films prepared by sputtering deposition, Applied Surface Science, 221(1-4), 281-287.
  • Kim, W.M., Ku, D.Y., Lee, K.S., Cheong, B. (2010). Effect of oxygen content and deposition temperature on the characteristics of thin silver films deposited by magnetron sputtering, Applied Surface Science, 257(4), 1331-1336.
  • Linnet, J., Walther, A.R., Wolff, C., Albrektsen, O., Mortensen, N.A., Kjelstrup-Hansen, J. (2018). Transparent and conductive electrodes by large-scale nano-structuring of noble metal thin-films, Optical Materials Express, 8(7), 1733-1746.
  • Mashaiekhy, J., Shafieizadeh, Z., Nahidi, H. (2002). Effect of substrate temperature and film thickness on the characteristics of silver thin films deposited by DC magnetron sputtering, The European Physical Journal-Applied Physics, 60(2), 20301.
  • Park, S.H., Lee, K.S., Reddy, A.S. (2011). Low emissivity Ag/Ta/glass multilayer thin films deposited by sputtering, J Appl Phys. 110(6), 063508.
  • Salinas, J.F., Yip, H.L., Chueh, C.C., Li, C.Z., Maldonado, J.L., Jen, A.K.Y. (2012). Optical design of transparent thin metal electrodes to enhance in-coupling and trapping of light in flexible polymer solar cells, Advanced Materials, 24(47), 6362-6367.
  • Standard Test Methods for Pressure-Sensitive Adhesive-Coated Tapes Used for Electrical and Electronic Applications, ASTM International, (2017). West Conshohocken, PA, ASTM D1000-17, www.astm.org (27.11.2018)
  • Wang, P., Huang, B., Lou, Z., Zhang, X., Qin, X., Dai, Y., Zheng, Z., Wang, X. (2010). Synthesis of highly efficient Ag-AgCl plasmonic photocatalysts with various structures, Chemistry–A European Journal, 16(2), 538-544.
  • Wijaya, E., Lenaerts, C., Maricot, S., Hastanin, J., Habraken, S., Vilcot, J.P., Boukherroub, R., Szunerits, S. (2011). Surface plasmon resonance-based biosensors: From the development of different SPR structures to novel surface functionalization strategies, Current Opinion in Solid State and Materials Science, 15(5), 208-224.
  • Yukimoto, N., Tsutsui, M., He, Y., Shintaku, H., Tanaka, S., Kawano, S., Kawai, T., Masateru, T. (2013). Tracking single-particle dynamics via combined optical and electrical sensing, Sci Rep., 3, 1855, 1-7.
Year 2019, , 32 - 37, 05.04.2019
https://doi.org/10.17780/ksujes.489183

Abstract

References

  • Akin Sonmez, N., Donmez, M., Comert, B., Ozcelik, S. (2018). Ag/M-seed/AZO/glass structures for low-E glass: Effects of metal seeds, International Journal of Applied Glass Science, 9(3), 383-391.
  • Cattin, L., Bernède, J.C., Morsli, M. (2013). Toward indium-free optoelectronic devices: Dielectric/metal/dielectric alternative transparent conductive electrode in organic photovoltaic cells, Pysica Stat. Sol. A, 210(6), 1047-1061.
  • Ding, G., Clavero, C., Schweigert, D., Le, M. (2015). Thickness and microstructure effects in the optical and electrical properties of silver thin films, AIP Advances, 5(11), 117234.
  • Fukuda, K., Lim, S.H., Anders, A. (2008). Coalescence of magnetron-sputtered silver islands affected by transition metal seeding (Ni, Cr, Nb, Zr, Mo, W, Ta) and other parameters, Thin Solid Films, 516, 4546-4552.
  • Greenbank, W., Hirsch, L., Chambon, S. (2018). Electrode de-wetting as a failure mechanism in thermally-aged OPV devices, Solar Energy Materials and Solar Cells, 178, 8-14.
  • Hagen, E., Uber Rubens, H. (1903).“Beziehungen des Reflexions-und Emissionsvermogens der Metalle zu ihrem elektrischen Leitvermogen, Ann Phys. 316, 873-901.
  • Hojabri, A., Kavyani, Z., Ghoranneviss, M. (2017). Effect of substrate temperatures on structural and morphological properties of nano-crystalline silver thin films grown on silicon substrates, Journal of Inorganic and Organometallic Polymers and Materials, 27(1), 53-60.
  • Huang, J., Liu, X., Lu, Y., Zhou, Y., Xu, J., Li, J., Tan, R. (2018). Seed-layer-free growth of ultra-thin Ag transparent conductive films imparts flexibility to polymer solar cells, Solar Energy Materials and Solar Cells, 184, 73-81.
  • Jung, Y.S. (2004). Study on texture evolution and properties of silver thin films prepared by sputtering deposition, Applied Surface Science, 221(1-4), 281-287.
  • Kim, W.M., Ku, D.Y., Lee, K.S., Cheong, B. (2010). Effect of oxygen content and deposition temperature on the characteristics of thin silver films deposited by magnetron sputtering, Applied Surface Science, 257(4), 1331-1336.
  • Linnet, J., Walther, A.R., Wolff, C., Albrektsen, O., Mortensen, N.A., Kjelstrup-Hansen, J. (2018). Transparent and conductive electrodes by large-scale nano-structuring of noble metal thin-films, Optical Materials Express, 8(7), 1733-1746.
  • Mashaiekhy, J., Shafieizadeh, Z., Nahidi, H. (2002). Effect of substrate temperature and film thickness on the characteristics of silver thin films deposited by DC magnetron sputtering, The European Physical Journal-Applied Physics, 60(2), 20301.
  • Park, S.H., Lee, K.S., Reddy, A.S. (2011). Low emissivity Ag/Ta/glass multilayer thin films deposited by sputtering, J Appl Phys. 110(6), 063508.
  • Salinas, J.F., Yip, H.L., Chueh, C.C., Li, C.Z., Maldonado, J.L., Jen, A.K.Y. (2012). Optical design of transparent thin metal electrodes to enhance in-coupling and trapping of light in flexible polymer solar cells, Advanced Materials, 24(47), 6362-6367.
  • Standard Test Methods for Pressure-Sensitive Adhesive-Coated Tapes Used for Electrical and Electronic Applications, ASTM International, (2017). West Conshohocken, PA, ASTM D1000-17, www.astm.org (27.11.2018)
  • Wang, P., Huang, B., Lou, Z., Zhang, X., Qin, X., Dai, Y., Zheng, Z., Wang, X. (2010). Synthesis of highly efficient Ag-AgCl plasmonic photocatalysts with various structures, Chemistry–A European Journal, 16(2), 538-544.
  • Wijaya, E., Lenaerts, C., Maricot, S., Hastanin, J., Habraken, S., Vilcot, J.P., Boukherroub, R., Szunerits, S. (2011). Surface plasmon resonance-based biosensors: From the development of different SPR structures to novel surface functionalization strategies, Current Opinion in Solid State and Materials Science, 15(5), 208-224.
  • Yukimoto, N., Tsutsui, M., He, Y., Shintaku, H., Tanaka, S., Kawano, S., Kawai, T., Masateru, T. (2013). Tracking single-particle dynamics via combined optical and electrical sensing, Sci Rep., 3, 1855, 1-7.
There are 18 citations in total.

Details

Primary Language Turkish
Subjects Electrical Engineering
Journal Section Electrical and Electronics Engineering
Authors

Nihan Akın Sönmez 0000-0002-2609-9657

Publication Date April 5, 2019
Submission Date November 28, 2018
Published in Issue Year 2019

Cite

APA Akın Sönmez, N. (2019). DC Magnetron Püskürtme Yöntemi ile Ag İnce Filmlerin Geliştirilmesi: Çok İnce Pt Ara-katmanın Rolü. Kahramanmaraş Sütçü İmam Üniversitesi Mühendislik Bilimleri Dergisi, 22(1), 32-37. https://doi.org/10.17780/ksujes.489183