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DC Magnetron Püskürtme Yöntemi ile Ag İnce Filmlerin Geliştirilmesi: Çok İnce Pt Ara-katmanın Rolü

Year 2019, Volume: 22 Issue: 1, 32 - 37, 05.04.2019
https://doi.org/10.17780/ksujes.489183

Abstract

Bu çalışmada, ince (~ 10 nm) Ag filmleri cam alttaşlar üzerine farklı
sürelerde DC magnetron püskürtme yöntemi ile kaplandı. Ayrıca Ag’nin cam
yüzeyine tutunması ve iletkenliğinin iyileştirilmesine destek olması hedefi ile
çok ince (~ 2 nm) Pt ara-katmanı cam yüzeyine püskürtülerek Ag/Pt/cam
numuneleri üretildi. Analiz sonuçlarından, hazırlanan her bir filmin kübik
yapıda, < 1 nm yüzey pürüzlülük değerine ve 5 ohm/kare’den daha düşük yüzey
direncine sahip olduğu belirlendi. Ag(9nm)/Pt(2nm)/cam numunesinin 3.02
ohm/kare’lik yüzey direnci ve 0.596 nm’lik RMS yüzey pürüzlülüğü değeri ile
diğer hazırlanan numunelere göre daha iyi elektriksel ve morfolojik özelliklere
sahip olduğu görüldü. Pt ara-katman oluşturulmasının Ag filminin iletkenliğini
artırması yanında kızılötesi yansıtıcılığını da artırdığı gözlendi.

References

  • Akin Sonmez, N., Donmez, M., Comert, B., Ozcelik, S. (2018). Ag/M-seed/AZO/glass structures for low-E glass: Effects of metal seeds, International Journal of Applied Glass Science, 9(3), 383-391.
  • Cattin, L., Bernède, J.C., Morsli, M. (2013). Toward indium-free optoelectronic devices: Dielectric/metal/dielectric alternative transparent conductive electrode in organic photovoltaic cells, Pysica Stat. Sol. A, 210(6), 1047-1061.
  • Ding, G., Clavero, C., Schweigert, D., Le, M. (2015). Thickness and microstructure effects in the optical and electrical properties of silver thin films, AIP Advances, 5(11), 117234.
  • Fukuda, K., Lim, S.H., Anders, A. (2008). Coalescence of magnetron-sputtered silver islands affected by transition metal seeding (Ni, Cr, Nb, Zr, Mo, W, Ta) and other parameters, Thin Solid Films, 516, 4546-4552.
  • Greenbank, W., Hirsch, L., Chambon, S. (2018). Electrode de-wetting as a failure mechanism in thermally-aged OPV devices, Solar Energy Materials and Solar Cells, 178, 8-14.
  • Hagen, E., Uber Rubens, H. (1903).“Beziehungen des Reflexions-und Emissionsvermogens der Metalle zu ihrem elektrischen Leitvermogen, Ann Phys. 316, 873-901.
  • Hojabri, A., Kavyani, Z., Ghoranneviss, M. (2017). Effect of substrate temperatures on structural and morphological properties of nano-crystalline silver thin films grown on silicon substrates, Journal of Inorganic and Organometallic Polymers and Materials, 27(1), 53-60.
  • Huang, J., Liu, X., Lu, Y., Zhou, Y., Xu, J., Li, J., Tan, R. (2018). Seed-layer-free growth of ultra-thin Ag transparent conductive films imparts flexibility to polymer solar cells, Solar Energy Materials and Solar Cells, 184, 73-81.
  • Jung, Y.S. (2004). Study on texture evolution and properties of silver thin films prepared by sputtering deposition, Applied Surface Science, 221(1-4), 281-287.
  • Kim, W.M., Ku, D.Y., Lee, K.S., Cheong, B. (2010). Effect of oxygen content and deposition temperature on the characteristics of thin silver films deposited by magnetron sputtering, Applied Surface Science, 257(4), 1331-1336.
  • Linnet, J., Walther, A.R., Wolff, C., Albrektsen, O., Mortensen, N.A., Kjelstrup-Hansen, J. (2018). Transparent and conductive electrodes by large-scale nano-structuring of noble metal thin-films, Optical Materials Express, 8(7), 1733-1746.
  • Mashaiekhy, J., Shafieizadeh, Z., Nahidi, H. (2002). Effect of substrate temperature and film thickness on the characteristics of silver thin films deposited by DC magnetron sputtering, The European Physical Journal-Applied Physics, 60(2), 20301.
  • Park, S.H., Lee, K.S., Reddy, A.S. (2011). Low emissivity Ag/Ta/glass multilayer thin films deposited by sputtering, J Appl Phys. 110(6), 063508.
  • Salinas, J.F., Yip, H.L., Chueh, C.C., Li, C.Z., Maldonado, J.L., Jen, A.K.Y. (2012). Optical design of transparent thin metal electrodes to enhance in-coupling and trapping of light in flexible polymer solar cells, Advanced Materials, 24(47), 6362-6367.
  • Standard Test Methods for Pressure-Sensitive Adhesive-Coated Tapes Used for Electrical and Electronic Applications, ASTM International, (2017). West Conshohocken, PA, ASTM D1000-17, www.astm.org (27.11.2018)
  • Wang, P., Huang, B., Lou, Z., Zhang, X., Qin, X., Dai, Y., Zheng, Z., Wang, X. (2010). Synthesis of highly efficient Ag-AgCl plasmonic photocatalysts with various structures, Chemistry–A European Journal, 16(2), 538-544.
  • Wijaya, E., Lenaerts, C., Maricot, S., Hastanin, J., Habraken, S., Vilcot, J.P., Boukherroub, R., Szunerits, S. (2011). Surface plasmon resonance-based biosensors: From the development of different SPR structures to novel surface functionalization strategies, Current Opinion in Solid State and Materials Science, 15(5), 208-224.
  • Yukimoto, N., Tsutsui, M., He, Y., Shintaku, H., Tanaka, S., Kawano, S., Kawai, T., Masateru, T. (2013). Tracking single-particle dynamics via combined optical and electrical sensing, Sci Rep., 3, 1855, 1-7.
Year 2019, Volume: 22 Issue: 1, 32 - 37, 05.04.2019
https://doi.org/10.17780/ksujes.489183

Abstract

References

  • Akin Sonmez, N., Donmez, M., Comert, B., Ozcelik, S. (2018). Ag/M-seed/AZO/glass structures for low-E glass: Effects of metal seeds, International Journal of Applied Glass Science, 9(3), 383-391.
  • Cattin, L., Bernède, J.C., Morsli, M. (2013). Toward indium-free optoelectronic devices: Dielectric/metal/dielectric alternative transparent conductive electrode in organic photovoltaic cells, Pysica Stat. Sol. A, 210(6), 1047-1061.
  • Ding, G., Clavero, C., Schweigert, D., Le, M. (2015). Thickness and microstructure effects in the optical and electrical properties of silver thin films, AIP Advances, 5(11), 117234.
  • Fukuda, K., Lim, S.H., Anders, A. (2008). Coalescence of magnetron-sputtered silver islands affected by transition metal seeding (Ni, Cr, Nb, Zr, Mo, W, Ta) and other parameters, Thin Solid Films, 516, 4546-4552.
  • Greenbank, W., Hirsch, L., Chambon, S. (2018). Electrode de-wetting as a failure mechanism in thermally-aged OPV devices, Solar Energy Materials and Solar Cells, 178, 8-14.
  • Hagen, E., Uber Rubens, H. (1903).“Beziehungen des Reflexions-und Emissionsvermogens der Metalle zu ihrem elektrischen Leitvermogen, Ann Phys. 316, 873-901.
  • Hojabri, A., Kavyani, Z., Ghoranneviss, M. (2017). Effect of substrate temperatures on structural and morphological properties of nano-crystalline silver thin films grown on silicon substrates, Journal of Inorganic and Organometallic Polymers and Materials, 27(1), 53-60.
  • Huang, J., Liu, X., Lu, Y., Zhou, Y., Xu, J., Li, J., Tan, R. (2018). Seed-layer-free growth of ultra-thin Ag transparent conductive films imparts flexibility to polymer solar cells, Solar Energy Materials and Solar Cells, 184, 73-81.
  • Jung, Y.S. (2004). Study on texture evolution and properties of silver thin films prepared by sputtering deposition, Applied Surface Science, 221(1-4), 281-287.
  • Kim, W.M., Ku, D.Y., Lee, K.S., Cheong, B. (2010). Effect of oxygen content and deposition temperature on the characteristics of thin silver films deposited by magnetron sputtering, Applied Surface Science, 257(4), 1331-1336.
  • Linnet, J., Walther, A.R., Wolff, C., Albrektsen, O., Mortensen, N.A., Kjelstrup-Hansen, J. (2018). Transparent and conductive electrodes by large-scale nano-structuring of noble metal thin-films, Optical Materials Express, 8(7), 1733-1746.
  • Mashaiekhy, J., Shafieizadeh, Z., Nahidi, H. (2002). Effect of substrate temperature and film thickness on the characteristics of silver thin films deposited by DC magnetron sputtering, The European Physical Journal-Applied Physics, 60(2), 20301.
  • Park, S.H., Lee, K.S., Reddy, A.S. (2011). Low emissivity Ag/Ta/glass multilayer thin films deposited by sputtering, J Appl Phys. 110(6), 063508.
  • Salinas, J.F., Yip, H.L., Chueh, C.C., Li, C.Z., Maldonado, J.L., Jen, A.K.Y. (2012). Optical design of transparent thin metal electrodes to enhance in-coupling and trapping of light in flexible polymer solar cells, Advanced Materials, 24(47), 6362-6367.
  • Standard Test Methods for Pressure-Sensitive Adhesive-Coated Tapes Used for Electrical and Electronic Applications, ASTM International, (2017). West Conshohocken, PA, ASTM D1000-17, www.astm.org (27.11.2018)
  • Wang, P., Huang, B., Lou, Z., Zhang, X., Qin, X., Dai, Y., Zheng, Z., Wang, X. (2010). Synthesis of highly efficient Ag-AgCl plasmonic photocatalysts with various structures, Chemistry–A European Journal, 16(2), 538-544.
  • Wijaya, E., Lenaerts, C., Maricot, S., Hastanin, J., Habraken, S., Vilcot, J.P., Boukherroub, R., Szunerits, S. (2011). Surface plasmon resonance-based biosensors: From the development of different SPR structures to novel surface functionalization strategies, Current Opinion in Solid State and Materials Science, 15(5), 208-224.
  • Yukimoto, N., Tsutsui, M., He, Y., Shintaku, H., Tanaka, S., Kawano, S., Kawai, T., Masateru, T. (2013). Tracking single-particle dynamics via combined optical and electrical sensing, Sci Rep., 3, 1855, 1-7.
There are 18 citations in total.

Details

Primary Language Turkish
Subjects Electrical Engineering
Journal Section Electrical and Electronics Engineering
Authors

Nihan Akın Sönmez 0000-0002-2609-9657

Publication Date April 5, 2019
Submission Date November 28, 2018
Published in Issue Year 2019Volume: 22 Issue: 1

Cite

APA Akın Sönmez, N. (2019). DC Magnetron Püskürtme Yöntemi ile Ag İnce Filmlerin Geliştirilmesi: Çok İnce Pt Ara-katmanın Rolü. Kahramanmaraş Sütçü İmam Üniversitesi Mühendislik Bilimleri Dergisi, 22(1), 32-37. https://doi.org/10.17780/ksujes.489183