Ferroelektrik Mems Jiroskopun Sonlu Elemanlar Analizi İle Modellenmesi Ve

Cilt: 15 Sayı: 1 17 Ağustos 2012
Kahramanmaraş Sütçü İmam Üniversitesi Mühendislik Bilimleri Dergisi Kapak
Kahramanmaraş Sütçü İmam Üniversitesi Mühendislik Bilimleri Dergisi
PDF İndir
EN TR

Modeling and Simulation with Finite Element Analysis of Ferroelectric MEMS gyroscopes

Abstract

ABSTRACT: This paper presents the design, modeling and analysis of ferroelectric material based MEMs with finite element method. Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity. MEMS structures can be driven by thermal, electrostatic, magnetic, optical and pneumatic drivers. Detection process is usually is made via optical and electronic signals. In this study, modal and harmonic analysis of MEMS gyroscopes composed of ferroelectric materials is realized by Finite Element Analysis, and then their results are compared. Finite element analysis of solid gyroscopes made up of PZT-5J and PZT-5H materials were modeled and simulated. Modal and harmonic analysis were performed for two different models. As a result of the analysis, model 2 of solid gyroscopes made up ​​of PZT-5H more sensitive than the angular velocities were observed.

Keywords

Kaynakça

  1. [1]. Burg A. Mems Gyroscopes And Their Applications
  2. [2]. Katz A. Residential Piezoelectric Energy Sources
  3. [3]. Li D.H., Zheng X.J., Wu B., Zhou Y.C. Fracture analysis of a surface through-thickness crack in PZT thin film under a continuous laser irradiation. Engineering Fracture Mechanics 76 (2009) 525–532
  4. [4]. Lu Y., Zhang W., Wu X. Design and analysis of novel solid biaxial micro-gyroscope with special mode excitation
  5. [5]. Maenaka K, Kohara H (2006) Novel Solid MicroGyroscope. In: Proceedings of micro electro mechanical systems workshop (MEMS 2006, Istanbul, Turkey January 2006), pp 634–637
  6. [6]. Malgaca L., KARAGÜLLE H. Piezoelektrik Kumanda Elemanı ve Algılayıcı İçeren Esnek Bir Kirişin Aktif Titreşim Kontrolünün Simülasyonu
  7. [7]. http://ansys.net/tips/Week13_TNT_Conversion_of_ Piezoelectric_Material_Data.pdf
  8. [8]. www.efunda .com

Ayrıntılar

Birincil Dil

İngilizce

Konular

-

Bölüm

-

Yazarlar

Zafer Özer

Faruk Karadağ

Muharrem Karaaslan

Yayımlanma Tarihi

17 Ağustos 2012

Gönderilme Tarihi

22 Şubat 2012

Kabul Tarihi

-

Yayımlandığı Sayı

Yıl 1970 Cilt: 15 Sayı: 1

DOI

https://doi.org/10.17780/ksujes.64554

IZ

https://izlik.org/JA29FG59LG

Kaynak Göster

RIS / Bibtex
APA
Özer, Z., Karadağ, F., Karaaslan, M., & Yılmaz, S. (2012). Modeling and Simulation with Finite Element Analysis of Ferroelectric MEMS gyroscopes. Kahramanmaraş Sütçü İmam Üniversitesi Mühendislik Bilimleri Dergisi, 15(1), 15-22. https://doi.org/10.17780/ksujes.64554